Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128118 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan +1 more | 2018-11-13 |
| 10125422 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Juan Carlos Rocha-Alvarez, Zheng John Ye, Ramprakash Sankarakrishnan, Jianhua Zhou | 2018-11-13 |
| 10083818 | Auto frequency tuned remote plasma source | Abdul Aziz Khaja, Ramesh Bokka, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez | 2018-09-25 |
| 10060032 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2018-08-28 |
| 10032608 | Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground | Jian J. Chen, Juan Carlos Rocha-Alvarez | 2018-07-24 |
| 10030306 | PECVD apparatus and process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2018-07-24 |
| 9865431 | Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber | Jian J. Chen, Amit Kumar BANSAL | 2018-01-09 |