Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115573 | Apparatus for high compressive stress film deposition to improve kit life | Junqi Wei, Ananthkrishna Jupudi, Zhitao Cao, Yueh Sheng Ow | 2018-10-30 |
| 10103012 | One-piece process kit shield for reducing the impact of an electric field near the substrate | William Johanson | 2018-10-16 |
| 9978569 | Adjustable process spacing, centering, and improved gas conductance | Lara Hawrylchak | 2018-05-22 |
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Junqi Wei, Zhitao Cao, Yueh Sheng Ow, Ananthkrishna Jupudi, Xin Wang +1 more | 2018-05-01 |
| 9957601 | Apparatus for gas injection in a physical vapor deposition chamber | Muhammad M. Rasheed, Alan A. Ritchie, Isaac Porras, Keith A. Miller | 2018-05-01 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed +1 more | 2018-05-01 |
| 9953812 | Integrated process kit for a substrate processing chamber | William Johanson, Xin Wang, Prashant Prabhakar Prabhu | 2018-04-24 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | William Johanson, Adolph Miller Allen, Xin Wang, Prashant Prabhakar Prabhu | 2018-03-06 |