Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032633 | Image transfer using EUV lithographic structure and double patterning process | Yann Mignot, Yongan Xu | 2018-07-24 |
| 9984920 | Design-aware pattern density control in directed self-assembly graphoepitaxy process | Cheng Chi, Lin Hu, Kafai Lai, Chi-Chun Liu, Jed W. Pitera | 2018-05-29 |
| 9953915 | Electrically conductive interconnect including via having increased contact surface area | James J. Demarest, Sean Teehan, Chih-Chao Yang | 2018-04-24 |
| 9953916 | Critical dimension shrink through selective metal growth on metal hardmask sidewalls | Hong He, Juntao Li, Chih-Chao Yang, Yunpeng Yin | 2018-04-24 |