Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082470 | Defect marking for semiconductor wafer inspection | Steven R. Lange, Junwei Wei, Daniel L. Kapp, Charles Amsden | 2018-09-25 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |
| 9887076 | Method and system for controlling convective flow in a light-sustained plasma | Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, Wei Zhao +2 more | 2018-02-06 |