IB

Ilya Bezel

KL Kla-Tencor: 6 patents #9 of 353Top 3%
Overall (2018): #20,022 of 503,207Top 4%
6
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10139283 Non-contact thermal measurements of VUV optics Anatoly Shchemelinin, Kenneth P. Gross 2018-11-27
10032620 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Anant Chimmalgi, Matthew Panzer 2018-07-24
9941655 High power broadband light source Anant Chimmalgi, Rahul Yadav, Anatoly Shchemelinin, Matthew Derstine 2018-04-10
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2018-03-27
9899205 System and method for inhibiting VUV radiative emission of a laser-sustained plasma source Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Aizaz Bhuiyan +3 more 2018-02-20
9887076 Method and system for controlling convective flow in a light-sustained plasma Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more 2018-02-06