Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109493 | Composite abrasive particles for chemical mechanical planarization composition and method of use thereof | Hongjun Zhou, Jo-Ann Theresa Schwartz, Malcolm Grief, Xiaobo Shi, Krishna P. Murella +5 more | 2018-10-23 |
| 10032644 | Barrier chemical mechanical planarization slurries using ceria-coated silica abrasives | Xiaobo Shi, James Allen Schlueter, Dnyanesh Chandrakant Tamboli | 2018-07-24 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra | 2018-05-22 |
| 9978609 | Low dishing copper chemical mechanical planarization | Xiaobo Shi, James Allen Schlueter, Joseph D. Rose, Malcolm Grief | 2018-05-22 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Anupama Mallikarjunan, Xinjian Lei, Moo-Sung Kim, Kirk Scott Cuthill | 2018-02-27 |