Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Xinjian Lei, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Haripin Chandra +1 more | 2018-09-18 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2018-06-12 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Xinjian Lei, Moo-Sung Kim, Kirk Scott Cuthill, Mark Leonard O'Neill | 2018-02-27 |
| 9879340 | Silicon-based films and methods of forming the same | Xinjian Lei, Matthew R. MacDonald, Manchao Xiao | 2018-01-30 |