Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Anupama Mallikarjunan, Xinjian Lei, Moo-Sung Kim, Mark Leonard O'Neill | 2018-02-27 |