Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Anupama Mallikarjunan, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 10106890 | Compositions and methods using same for deposition of silicon-containing film | Jianheng Li, John Francis Lehmann, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, William Robert Entley | 2018-10-23 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Manchao Xiao, Haripin Chandra, Anupama Mallikarjunan +1 more | 2018-09-18 |
| 9994954 | Volatile dihydropyrazinly and dihydropyrazine metal complexes | John Anthony Thomas Norman, Sergei Vladimirovich Ivanov | 2018-06-12 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Mark Leonard O'Neill | 2018-05-22 |
| 9922818 | Alkyl-alkoxysilacyclic compounds | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Jianheng Li, William Robert Entley, Jennifer Lynn Anne Achtyl | 2018-03-20 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Anupama Mallikarjunan, Moo-Sung Kim, Kirk Scott Cuthill, Mark Leonard O'Neill | 2018-02-27 |
| 9879340 | Silicon-based films and methods of forming the same | Anupama Mallikarjunan, Matthew R. MacDonald, Manchao Xiao | 2018-01-30 |