Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109493 | Composite abrasive particles for chemical mechanical planarization composition and method of use thereof | Hongjun Zhou, Jo-Ann Theresa Schwartz, Xiaobo Shi, Krishna P. Murella, Steven Charles Winchester +5 more | 2018-10-23 |
| 9978609 | Low dishing copper chemical mechanical planarization | Xiaobo Shi, James Allen Schlueter, Joseph D. Rose, Mark Leonard O'Neill | 2018-05-22 |