Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978609 | Low dishing copper chemical mechanical planarization | Xiaobo Shi, James Allen Schlueter, Mark Leonard O'Neill, Malcolm Grief | 2018-05-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978609 | Low dishing copper chemical mechanical planarization | Xiaobo Shi, James Allen Schlueter, Mark Leonard O'Neill, Malcolm Grief | 2018-05-22 |