Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109493 | Composite abrasive particles for chemical mechanical planarization composition and method of use thereof | Hongjun Zhou, Jo-Ann Theresa Schwartz, Malcolm Grief, Xiaobo Shi, Krishna P. Murella +5 more | 2018-10-23 |
| 10032644 | Barrier chemical mechanical planarization slurries using ceria-coated silica abrasives | Xiaobo Shi, James Allen Schlueter, Mark Leonard O'Neill | 2018-07-24 |