Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Atsushi Gomi, Tetsuya Miyashita, Toru Kitada, Kanto Nakamura | 2017-10-17 |
| 9567667 | Dual-target sputter deposition with controlled phase difference between target powers | Naoki Watanabe, Hiroshi Miki, Tooru KITADA, Yasuhiko Kojima | 2017-02-14 |
| 9551060 | Film forming apparatus and film forming method | Atsushi Gomi, Kanto Nakamura, Tooru KITADA, Yasunobu Suzuki | 2017-01-24 |