Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567667 | Dual-target sputter deposition with controlled phase difference between target powers | Shinji Furukawa, Naoki Watanabe, Tooru KITADA, Yasuhiko Kojima | 2017-02-14 |
| 9570601 | Semiconductor device and method of manufacturing the same | Yuki Mori, Toshiyuki Mine, Mieko Matsumura, Hirotaka Hamamura | 2017-02-14 |