Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846133 | Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam | Yoshinobu Kimura, Natsuki Tsuno, Hiroya Ohta, Renichi Yamada, Toshiyuki Ohno | 2017-12-19 |
| 9570601 | Semiconductor device and method of manufacturing the same | Toshiyuki Mine, Hiroshi Miki, Mieko Matsumura, Hirotaka Hamamura | 2017-02-14 |