Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846133 | Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam | Natsuki Tsuno, Hiroya Ohta, Renichi Yamada, Toshiyuki Ohno, Yuki Mori | 2017-12-19 |
| 9659744 | Charged particle beam apparatus and inspection method using the same | Natsuki Tsuno, Naomasa Suzuki, Hideyuki Kazumi, Shoji Hotta | 2017-05-23 |