Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704687 | Charged particle beam application device | Momoyo Enyama, Akira Ikegami, Hideto Dohi, Hideyuki Kazumi | 2017-07-11 |
| 9659744 | Charged particle beam apparatus and inspection method using the same | Natsuki Tsuno, Hideyuki Kazumi, Shoji Hotta, Yoshinobu Kimura | 2017-05-23 |
| 9653256 | Charged particle-beam device | Akira Ikegami, Hideto Dohi, Hideyuki Kazumi, Yoichi Ose, Momoyo Enyama +2 more | 2017-05-16 |
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Tasuku Yano, Yasunari Sohda, Muneyuki Fukuda, Katsunori Onuki, Hajime Kawano | 2017-05-09 |