Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799483 | Charged particle beam device and detection method using said device | Tomoyasu Shojo, Hajime Kawano | 2017-10-24 |
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Tasuku Yano, Muneyuki Fukuda, Katsunori Onuki, Hajime Kawano, Naomasa Suzuki | 2017-05-09 |
| 9543053 | Electron beam equipment | Takeyoshi Ohashi, Takafumi Miwa, Hajime Kawano | 2017-01-10 |