Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Junichi Tanaka, Zhaohui Cheng, Ruriko Tsuneta, Hiroki Kawada +1 more | 2017-11-28 |
| 9543053 | Electron beam equipment | Yasunari Sohda, Takafumi Miwa, Hajime Kawano | 2017-01-10 |
| 9536170 | Measurement method, image processing device, and charged particle beam apparatus | Junichi Tanaka, Yutaka Hojo, Hiroyuki Shindo, Hiroki Kawada | 2017-01-03 |