Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Takeyoshi Ohashi, Junichi Tanaka, Zhaohui Cheng, Ruriko Tsuneta +1 more | 2017-11-28 |
| 9824938 | Charged particle beam device and inspection device | Atsuko Yamaguchi, Osamu Inoue | 2017-11-21 |
| 9702695 | Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof | Osamu Inoue, Miyako Matsui, Takahiro Kawasaki, Naoshi Itabashi, Takashi Takahama +2 more | 2017-07-11 |
| 9658063 | Method and device for line pattern shape evaluation | Atsuko Yamaguchi | 2017-05-23 |
| 9536170 | Measurement method, image processing device, and charged particle beam apparatus | Takeyoshi Ohashi, Junichi Tanaka, Yutaka Hojo, Hiroyuki Shindo | 2017-01-03 |