Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824938 | Charged particle beam device and inspection device | Osamu Inoue, Hiroki Kawada | 2017-11-21 |
| 9658063 | Method and device for line pattern shape evaluation | Hiroki Kawada | 2017-05-23 |