Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Yasunari Sohda, Muneyuki Fukuda, Katsunori Onuki, Hajime Kawano, Naomasa Suzuki | 2017-05-09 |