Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846133 | Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam | Yoshinobu Kimura, Natsuki Tsuno, Hiroya Ohta, Renichi Yamada, Yuki Mori | 2017-12-19 |