Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567667 | Dual-target sputter deposition with controlled phase difference between target powers | Shinji Furukawa, Naoki Watanabe, Hiroshi Miki, Tooru KITADA | 2017-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567667 | Dual-target sputter deposition with controlled phase difference between target powers | Shinji Furukawa, Naoki Watanabe, Hiroshi Miki, Tooru KITADA | 2017-02-14 |