Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567667 | Dual-target sputter deposition with controlled phase difference between target powers | Shinji Furukawa, Naoki Watanabe, Hiroshi Miki, Yasuhiko Kojima | 2017-02-14 |
| 9551060 | Film forming apparatus and film forming method | Atsushi Gomi, Kanto Nakamura, Yasunobu Suzuki, Shinji Furukawa | 2017-01-24 |