Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Tetsuya Miyashita, Toru Kitada, Kanto Nakamura | 2017-10-17 |
| 9576850 | Method for manufacturing semiconductor device | Tadahiro Ishizaka, Kenji Suzuki, Tatsuo Hatano, Yasushi Mizusawa | 2017-02-21 |
| 9551060 | Film forming apparatus and film forming method | Kanto Nakamura, Tooru KITADA, Yasunobu Suzuki, Shinji Furukawa | 2017-01-24 |