Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Atsushi Gomi, Tetsuya Miyashita, Toru Kitada | 2017-10-17 |
| 9551060 | Film forming apparatus and film forming method | Atsushi Gomi, Tooru KITADA, Yasunobu Suzuki, Shinji Furukawa | 2017-01-24 |