Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Atsushi Gomi, Tetsuya Miyashita, Kanto Nakamura | 2017-10-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Atsushi Gomi, Tetsuya Miyashita, Kanto Nakamura | 2017-10-17 |