Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Atsushi Gomi, Toru Kitada, Kanto Nakamura | 2017-10-17 |
| 9673078 | Cooling processing apparatus and method for operating the same | Masamichi Hara, Naoyuki Suzuki, Kaoru Yamamoto, Kouji Maeda | 2017-06-06 |