Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9787222 | Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus | Kaoru Yamamoto, Shinji Orimoto | 2017-10-10 |
| 9673078 | Cooling processing apparatus and method for operating the same | Tetsuya Miyashita, Masamichi Hara, Kaoru Yamamoto, Kouji Maeda | 2017-06-06 |
| 9607868 | Substrate heat treatment apparatus | Takuji Okada, Toshikazu Nakazawa | 2017-03-28 |