Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9787222 | Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus | Kaoru Yamamoto, Naoyuki Suzuki | 2017-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9787222 | Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus | Kaoru Yamamoto, Naoyuki Suzuki | 2017-10-10 |