Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786470 | Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator | Shao-Hua Wang, Sheng-Wei Lee | 2017-10-10 |
| 9781994 | Wafer cleaning | Shang-Yuan Yu, Chi-Fu Yu, Shao-Yen Ku, Tzu-Yang Chung, Hsiao Chien-Wen +1 more | 2017-10-10 |
| 9721853 | System and method for forming a semiconductor device | Chun Hsiung Tsai | 2017-08-01 |
| 9663854 | High-throughput system and method for post-implantation single wafer warm-up | Tsun-Jen Chan, Cheng-Hung Hu, Yi-Hann Chen, Kang Hua Chang | 2017-05-30 |
| 9606181 | Processing apparatus, ion implantation apparatus and ion implantation method | Shao-Hua Wang, Sheng-Wei Lee | 2017-03-28 |
| 9589804 | Method of forming finFET gate oxide | Cheng-Ta Wu, Shiu-Ko JangJian, Chung-Ren Sun, Ting-Chun Wang, Jun Cheng | 2017-03-07 |
| 9543438 | Contact resistance reduction technique | Chun Hsiung Tsai | 2017-01-10 |