Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786470 | Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator | Ming-Te Chen, Sheng-Wei Lee | 2017-10-10 |
| 9606181 | Processing apparatus, ion implantation apparatus and ion implantation method | Ming-Te Chen, Sheng-Wei Lee | 2017-03-28 |