Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786470 | Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator | Shao-Hua Wang, Ming-Te Chen | 2017-10-10 |
| 9679746 | Ion implantation tool and ion implantation method | — | 2017-06-13 |
| 9648178 | Embedded job accounting system and method | — | 2017-05-09 |
| 9606181 | Processing apparatus, ion implantation apparatus and ion implantation method | Shao-Hua Wang, Ming-Te Chen | 2017-03-28 |