Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805946 | Photoresist removal | Shang-Yuan Yu, Hsiao Chien-Wen, Shao-Fu Hsu, Yuan-Chih Chiang, Wen-Chang Tsai +1 more | 2017-10-31 |
| 9781994 | Wafer cleaning | Shang-Yuan Yu, Ming-Te Chen, Chi-Fu Yu, Tzu-Yang Chung, Hsiao Chien-Wen +1 more | 2017-10-10 |
| 9764364 | Apparatus and methods for movable megasonic wafer probe | Ying-Hsueh Chang Chien, Chin-Hsiang Lin, Chi-Ming Yang, Ming-Hsi Yeh | 2017-09-19 |
| 9728533 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacture | Chun-Li Chou, Pei-Hung Chen, Jui-Ping Chuang | 2017-08-08 |
| 9704714 | Method for controlling surface charge on wafer surface in semiconductor fabrication | Weibo Yu, Jui-Ping Chuang, Chen-Hsiang Lu | 2017-07-11 |
| 9601360 | Wafer transport method | Jyun-Chao Chen, Ming-Jung Chen, Tsai-Pao Su | 2017-03-21 |
| 9583352 | Method of etching and cleaning wafers | Wen-Chang Tsai, Hsieh-Ching Wei, Yuan-Chih Chiang, Jui-Chuan Chang, Yung-Li Tsai | 2017-02-28 |