Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805913 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chin-Hsiang Lin | 2017-10-31 |
| 9799530 | Method of selectively removing silicon nitride and etching apparatus thereof | Ying-Hsueh Changchien, Yu-Ming Lee | 2017-10-24 |
| 9764364 | Apparatus and methods for movable megasonic wafer probe | Ying-Hsueh Chang Chien, Chin-Hsiang Lin, Ming-Hsi Yeh, Shao-Yen Ku | 2017-09-19 |
| 9754796 | Hard mask removal scheme | Ying-Hsueh Changchien, Yu-Ming Lee | 2017-09-05 |
| 9741585 | Reactive radical treatment for polymer removal and workpiece cleaning | Chung-Chieh Lee, Horng-Huei Tseng | 2017-08-22 |
| 9691641 | Apparatus and method of cleaning wafers | Chia-Hung Huang, Jeng-Jyi Hwang | 2017-06-27 |
| 9579697 | System and method of cleaning FOUP | Jyh-Shiou Hsu, Kuo-Sheng Chuang | 2017-02-28 |
| 9564509 | Method of fabricating an integrated circuit device | Ming-Hsi Yeh, Hsien-Hsin Lin, Ying-Hsueh Chang Chien, Yi-Fang Pai, Chin-Hsiang Lin | 2017-02-07 |
| 9536757 | Device manufacturing cleaning process using vaporized solvent | Albert Chen, Kuo-Sheng Chuang | 2017-01-03 |