Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799530 | Method of selectively removing silicon nitride and etching apparatus thereof | Yu-Ming Lee, Chi-Ming Yang | 2017-10-24 |
| 9754796 | Hard mask removal scheme | Yu-Ming Lee, Chi-Ming Yang | 2017-09-05 |