Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805946 | Photoresist removal | Shang-Yuan Yu, Shao-Yen Ku, Shao-Fu Hsu, Yuan-Chih Chiang, Wen-Chang Tsai +1 more | 2017-10-31 |
| 9781994 | Wafer cleaning | Shang-Yuan Yu, Ming-Te Chen, Chi-Fu Yu, Shao-Yen Ku, Tzu-Yang Chung +1 more | 2017-10-10 |