Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733568 | Tool and method of developing | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Li-Kong Turn, Fei-Gwo Tsai | 2017-08-15 |
| 9728533 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacture | Chun-Li Chou, Shao-Yen Ku, Pei-Hung Chen | 2017-08-08 |
| 9704714 | Method for controlling surface charge on wafer surface in semiconductor fabrication | Weibo Yu, Chen-Hsiang Lu, Shao-Yen Ku | 2017-07-11 |
| 9559205 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2017-01-31 |
| 9553090 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2017-01-24 |