Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733568 | Tool and method of developing | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Jui-Ping Chuang, Li-Kong Turn | 2017-08-15 |
| 9618855 | Lithography system and method for mask inspection | Bo-Tsun Liu, Chieh-Huan Ku | 2017-04-11 |