Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee, Ming-Shiou Kuo | 2017-07-18 |
| 9574265 | Rotation plus vibration magnet for magnetron sputtering apparatus | Bo-Hung Lin, Ming-Chih Tsai, You-Hua Chou | 2017-02-21 |
| 9548241 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng +3 more | 2017-01-17 |