Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718164 | Polishing system and polishing method | Shih-Chi Lin, Kun-Tai Wu, You-Hua Chou, Min Hao Hong, Chih-Jen Wu +4 more | 2017-08-01 |
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Ming-Shiou Kuo | 2017-07-18 |