Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716044 | Interlayer dielectric structure with high aspect ratio process (HARP) | Jen-Chi Chang, Chun-Li Lin, Kai-Shiung Hsu, Wen-Long Lee, Po-Hsiung Leu +1 more | 2017-07-25 |
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee | 2017-07-18 |