Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee, Ming-Shiou Kuo | 2017-07-18 |