Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716044 | Interlayer dielectric structure with high aspect ratio process (HARP) | Chun-Li Lin, Kai-Shiung Hsu, Ming-Shiou Kuo, Wen-Long Lee, Po-Hsiung Leu +1 more | 2017-07-25 |
| 9607809 | High density plasma reactor with multiple top coils | Chi-Ching Lo, Po-Hsiung Leu, Tzu-Chun LIN, Ding-I Liu, Ho-Ta Chuang | 2017-03-28 |