Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607809 | High density plasma reactor with multiple top coils | Po-Hsiung Leu, Tzu-Chun LIN, Ding-I Liu, Jen-Chi Chang, Ho-Ta Chuang | 2017-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607809 | High density plasma reactor with multiple top coils | Po-Hsiung Leu, Tzu-Chun LIN, Ding-I Liu, Jen-Chi Chang, Ho-Ta Chuang | 2017-03-28 |