CL

Chi-Ching Lo

TSMC: 1 patents #1,425 of 2,832Top 55%
Overall (2017): #462,177 of 506,227Top 95%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9607809 High density plasma reactor with multiple top coils Po-Hsiung Leu, Tzu-Chun LIN, Ding-I Liu, Jen-Chi Chang, Ho-Ta Chuang 2017-03-28