Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9574265 | Rotation plus vibration magnet for magnetron sputtering apparatus | Ming-Chih Tsai, You-Hua Chou, Chung-En Kao | 2017-02-21 |
| 9543125 | Directing plasma distribution in plasma-enhanced chemical vapor deposition | Hsiang-Wei Lin, Chia-Ho Chen | 2017-01-10 |