Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709885 | Photomask blank and method for manufacturing photomask blank | Yukio Inazuki, Takashi Yoshii, Toyohisa Sakurada, Akira Ikeda, Hideo Kaneko +1 more | 2017-07-18 |
| 9580623 | Patterning process using a boron phosphorus silicon glass film | Seiichiro Tachibana, Yoshinori Taneda, Rie Kikuchi, Tsutomu Ogihara, Karen E. Petrillo +1 more | 2017-02-28 |