Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709885 | Photomask blank and method for manufacturing photomask blank | Yukio Inazuki, Takashi Yoshii, Akira Ikeda, Hideo Kaneko, Satoshi Watanabe +1 more | 2017-07-18 |
| 9645485 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Yukio Inazuki, Hideo Kaneko | 2017-05-09 |