Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778559 | Method for preparing halftone phase shift photomask blank | Yukio Inazuki | 2017-10-03 |
| 9778560 | Method for preparing halftone phase shift photomask blank | — | 2017-10-03 |
| 9651858 | Binary photomask blank, preparation thereof, and preparation of binary photomask | Yukio Inazuki, Kazuhiro Nishikawa | 2017-05-16 |
| 9645485 | Halftone phase shift photomask blank and making method | Yukio Inazuki, Hideo Kaneko, Toyohisa Sakurada | 2017-05-09 |